Transpector CPM 3 緊湊型過程監控器

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公司名稱 英福康（廣州）真空儀器有限公司
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更新時間 2021/2/3 16:21:45
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促銷詳情

促銷時間：

特價說明：

促銷詳細：

2020年01月08日至 2020年02月08日

特價促銷

模內澆口分離自動化，降低對人的依賴度；傳統的塑膠模具開模后產品與澆口相連，需二道工序進行人工剪切分離，模內熱切模具將澆口分離提前至開模前，消除后續工序，有利于生產自動化，降低對人的依賴。

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快速、現場就緒過程監測系統

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功能

ALD、蝕刻、CVD 和 300 mm 除氣殘余氣體分析儀 — 實現實時過程監測和分析
ALD 就緒，測量速度為每點 1.8 ms（每秒 555 點）
在大多數苛刻 CVD 和蝕刻應用中，展現出經實踐驗證的耐久性和可靠性
應用集成 — Transpector CPM 集成 FabGuard 軟件，由 INFICON 應用專家提供支持，是一款強大的過程監測與診斷工具
緊湊尺寸 — 允許輕松集成到半導體生產設備
Hexblock™ 含三個壓力進口并減少表面積，以小化表面反應時間和響應時間
電容隔膜計 (CDG) — CDG 允許用戶監測過程壓力，并自動保護系統不出現壓力偏移
自動校準 — 確保*數據穩定性和精度，以便進行各傳感器和工具的腔室匹配

規格

類型		100 AMU CPM	200 AMU CPM	300 AMU CPM
分辨率		1 amu wide @ 10% peak height	1 amu wide @ 10% peak height	1 amu wide @ 10% peak height
總壓力范圍1		5E-7 - 1E-3 Torr	5E-7 - 1E-3 Torr	5E-7 - 1E-3 Torr
總壓力精度2		+/- 25% 1E-6 - 1E-3 Torr	+/- 25% 1E-6 - 1E-3 Torr	+/- 25% 1E-6 - 1E-3 Torr
大離子源工作壓力3		1E-3 Torr	1E-3 Torr	1E-3 Torr
標稱工作壓力?		2E-4 Torr	2E-4 Torr	2E-4 Torr
系統工作壓力		1E-8 Torr - 1.2 atm	1E-8 Torr - 1.2 atm	1E-8 Torr - 1.2 atm
靈敏度（低發射）		> 4E-6 Amps/Torr	> 2E-6 Amps/Torr	> 1E-6 Amps/Torr
靈敏度（高發射）		> 2E-5 Amps/Torr	> 1E-5 Amps/Torr	> 5E-6 Amps/Torr
小可檢測分壓?		1E-13 Torr	2E-13 Torr	4E-13 Torr
大數據速率		1.8 ms/point (555 points/sec)	1.8 ms/point (555 points/sec)	1.8 ms/point (555 points/sec)
豐度靈敏度?		< 5="">	< 10="">	< 100="">
零沖擊?		< 2="">	< 25="">	< 200="">
檢測限值?		< 1="">	< 2="">	< 4="">
線性度?		+/- 20%	+/- 20%	+/- 20%
小背景壓力		1E-8 Torr	1E-8 Torr	1E-8 Torr
大傳感器和進氣溫度	°C	150	150	150

¹使用總壓強鏡頭獲得的離子源壓強讀數 @ 低發射

²總壓強準確度 @ 低發射

³離子源大工作壓強 @ 低發射

⁴2x10^-4Torr 的離子源將在四極區域產生大約 1x10^-5Torr 的壓強

⁵EM 開啟且保壓時間為 1 秒時離子源處的 MDPP

⁶質量數 40 對 41 AMU 的貢獻

⁷零沖擊對 2 AMU 的貢獻

⁸空氣中的氪的小可檢出濃度 @ 1 秒保壓時間

⁹適用于 1 Torr 孔板或更低設置。0.1 至 2 倍標稱孔板壓強條件下的線性 @ 低發射

耗材

100 AMU CPM
零件號	明細
059-0196	NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400	Replacement c-ring, CPM
070-1042	O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1	CPM Replacement Diaphragm Kit
923-706-G10	Orifice Kit, CPM, 30 Torr
923-706-G3	Orifice Kit, CPM, 10 Torr
923-706-G4	Orifice Kit, CPM, 1 Torr
923-706-G6	Orifice Kit, CPM, 10 mTorr
923-706-G7	Orifice Kit, CPM, 360 mTorr
923-706-G8	Orifice Kit, CPM, 15 mTorr
923-706-G9	Orifice Kit, CPM, 3 Torr
923-707-G1	Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2	Sniffer Kit, CPM, 100 Torr
923-707-G3	Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1	Electron Multiplier Kit, Spare
964-710-G1	Filament Kit CPM Tungsten
964-710-G2	Filament Kit CPM Coated
964-711-G1	Ion Source Kit CPM Tungsten
964-711-G2	Ion Source Kit CPM Tungsten w/Liner
964-712-G1	Ion Source Kit CPM Coated
964-712-G2	Ion Source Kit CPM Coated w/Liner
200 AMU CPM
零件號	明細
059-0196	NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400	Replacement c-ring, CPM
070-1042	O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1	CPM Replacement Diaphragm Kit
923-706-G10	Orifice Kit, CPM, 30 Torr
923-706-G3	Orifice Kit, CPM, 10 Torr
923-706-G4	Orifice Kit, CPM, 1 Torr
923-706-G6	Orifice Kit, CPM, 10 mTorr
923-706-G7	Orifice Kit, CPM, 360 mTorr
923-706-G8	Orifice Kit, CPM, 15 mTorr
923-706-G9	Orifice Kit, CPM, 3 Torr
923-707-G1	Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2	Sniffer Kit, CPM, 100 Torr
923-707-G3	Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1	Electron Multiplier Kit, Spare
964-710-G1	Filament Kit CPM Tungsten
964-710-G2	Filament Kit CPM Coated
964-711-G1	Ion Source Kit CPM Tungsten
964-711-G2	Ion Source Kit CPM Tungsten w/Liner
964-712-G1	Ion Source Kit CPM Coated
964-712-G2	Ion Source Kit CPM Coated w/Liner
300 AMU CPM
零件號	明細
059-0196	NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400	Replacement c-ring, CPM
070-1042	O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1	CPM Replacement Diaphragm Kit
923-706-G10	Orifice Kit, CPM, 30 Torr
923-706-G3	Orifice Kit, CPM, 10 Torr
923-706-G4	Orifice Kit, CPM, 1 Torr
923-706-G6	Orifice Kit, CPM, 10 mTorr
923-706-G7	Orifice Kit, CPM, 360 mTorr
923-706-G8	Orifice Kit, CPM, 15 mTorr
923-706-G9	Orifice Kit, CPM, 3 Torr
923-707-G1	Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2	Sniffer Kit, CPM, 100 Torr
923-707-G3	Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1	Electron Multiplier Kit, Spare
964-710-G1	Filament Kit CPM Tungsten
964-710-G2	Filament Kit CPM Coated
964-711-G1	Ion Source Kit CPM Tungsten
964-711-G2	Ion Source Kit CPM Tungsten w/Liner
964-712-G1	Ion Source Kit CPM Coated
964-712-G2	Ion Source Kit CPM Coated w/Liner

備件

100 AMU CPM
零件號	明細
032-0079	Turbo Molecular Pump (w/CF40 flange)
059-0400	Replacement c-ring, CPM
915-724-G1	Spare Ion Source Liner
922-204-G1	Capillary, CPM, 1.5 m
922-204-G3	Capillary, CPM, 3 m
923-403-P2	US18238, SMC VQ100 Manifold for CPM
923-417-G1	Foreline Protection Kit, CPM
923-710-G1	HexBlock Orifice Replacement tools
923-711-G1	HexBlock Valve Replacement Kit
923-712-G1	HexBlock Orifice Gasket, Quantity 5
923-723-G2	2 Stage Diaphragm Foreline Pump
964-208-G11	CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12	CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13	CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14	CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1	CPM Cable Box Assembly
964-403-P1	CPM Manifold Heater
964-603-G2	CPM Controller Box
964-720-G1	CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2	CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3	CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4	CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
200 AMU CPM
零件號	明細
032-0079	Turbo Molecular Pump (w/CF40 flange)
059-0400	Replacement c-ring, CPM
915-724-G1	Spare Ion Source Liner
922-204-G1	Capillary, CPM, 1.5 m
922-204-G3	Capillary, CPM, 3 m
923-403-P2	US18238, SMC VQ100 Manifold for CPM
923-417-G1	Foreline Protection Kit, CPM
923-710-G1	HexBlock Orifice Replacement tools
923-711-G1	HexBlock Valve Replacement Kit
923-712-G1	HexBlock Orifice Gasket, Quantity 5
923-723-G2	2 Stage Diaphragm Foreline Pump
964-208-G11	CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12	CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13	CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14	CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1	CPM Cable Box Assembly
964-403-P1	CPM Manifold Heater
964-603-G2	CPM Controller Box
964-720-G1	CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2	CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3	CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4	CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
300 AMU CPM
零件號	明細
032-0079	Turbo Molecular Pump (w/CF40 flange)
059-0400	Replacement c-ring, CPM
915-724-G1	Spare Ion Source Liner
922-204-G1	Capillary, CPM, 1.5 m
922-204-G3	Capillary, CPM, 3 m
923-403-P2	US18238, SMC VQ100 Manifold for CPM
923-417-G1	Foreline Protection Kit, CPM
923-710-G1	HexBlock Orifice Replacement tools
923-711-G1	HexBlock Valve Replacement Kit
923-712-G1	HexBlock Orifice Gasket, Quantity 5
923-723-G2	2 Stage Diaphragm Foreline Pump
964-208-G11	CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12	CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13	CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14	CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1	CPM Cable Box Assembly
964-403-P1	CPM Manifold Heater
964-603-G2	CPM Controller Box
964-720-G1	CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2	CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3	CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4	CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable